SUSS probe systems installed in IMEC's research facilities

(Press Release) -- SUSS MicroTec AG, a leading manufacturer of probe systems used to characterize semiconductor devices at wafer level, has installed the latest 300 mm technology in wafer probe systems at the nanoelectronics research center IMEC in Leuven, Belgium.  Both PA300PS ProbeShield® semiautomatic probe systems with ReAlign™ and ContactView™ technology and PA300 probe systems for RF-noise and S-parameter measurements have been installed.  An agreement has been made for further collaboration on enhancing 300 mm probe systems in the following years.

“We are very pleased to sign this agreement with IMEC, Europe’s leading independent nanoelectronics research center,” said Dr. Claus Dietrich, Managing Director of the Test Systems division at SUSS MicroTec. “This collaboration proves SUSS MicroTec is offering the latest technology for advanced wafer probing, like the unique ReAlign and ContactView solutions. Furthermore, it shows that we continue to set standards in excellent electrical performance, such as noise and leakage levels, with our cutting-edge hardware and software solutions.”

In another development, SUSS MicroTec will deliver a second vacuum probe system to IMEC. The manual system will compliment the existing semiautomatic vacuum system, which is currently being used to test the reliability of MEMS devices at wafer level. These unique systems allow the user to place the device under test in ultra-high vacuum environments that simulate actual operating conditions. Therefore the device can be tested before the packaging process, which decreases feedback time for R&D and saves costs.

IMEC’s technologies and devices are on the front line of technology development, and therefore new measurement challenges arise continuously. Close collaboration with SUSS MicroTec will ensure early feedback on possible future needs for wafer-level testing, and IMEC will explore solutions and future enhancements together with SUSS.

For more information, please contact:
Joshua M. Preston, Marketing and Communications Manager, SUSS MicroTec Test Systems
Tel: +49 (0) 35240 73-349, E-Mail: jpreston@sussdd.de

Comments

[John]

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