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Comments

Neil Kane

We appreciate Professor Maboudian's comments about the development of SiC MEMS applications. Prof. Maboudian correctly points out that SiC has exceptional properties which are exceeded only by diamond. But her characterization of the commercial state of diamond MEMS is not entirely accurate. Our company is shipping large area, foundry grade starter wafers made entirely of diamond for MEMS and sensor development. We agree with her characterization of the traditional impediments to developing MEMS devices with diamond, but those days are behind us. Diamond is now a viable MEMS material, and an affordable commercial supply of diamond substrates is available. More details can be found at our website: www.thindiamond.com

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