by Mieke Van Bavel, Ph.D.
Science Editor, IMEC
Wireless sensor nodes are nowadays employed in many different application fields such as healthcare, automotive and predictive maintenance, but these sensors currently provide limited lifetime as they require significant power for operation. Increasing lifetime, preferably unlimited, becomes possible with energy harvesting. One promising way for power generation is vibrations, and an electrostatic transduction method can be employed to transfer mechanical into electrical energy. An electrostatic energy harvester is, in essence, a movable capacitor which needs a high voltage source for power generation. A patterned electret could operate as this voltage source. In its most general meaning, an electret is a material that stores a quasi-permanent electric charge upon its polarization. It can be called the electrical equivalent of a permanent magnet. It is an important component for a MEMS based energy harvester.
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