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Dr. MP Divakar

Angular random walk (ARW) that Dr. David Arch is referring to will always exist in a MEMS Gyro no matter how precise the fabrication process is. Since most MEMS Gyro's work on the principle of Coriolis effect, their electromechanical behaviour at the micro-scale is not completely deterministic, i.e., the laws of structural dynamics need to be amended to include random effects, perhaps using Monte Carlo simulation methods. Further the dynamic system identification must closely take into account the characteristic length of the cavity and the gas properties (if any encapsulation is used, like Nitrogen, Helium, etc.), in particular the mean free path. The MEMS cavity sizing needs to carefully designed around these parameters.

Dr. MP Divakar

farhat

can you please provide me Dr. David Arch's email address?

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