SPTS Technologies, a supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, announced this week that it has acquired XACTIX, a provider of xenon difluoride (XeF2) based release etch technology. XACTIX is located in Pittsburgh, Pennsylvania. Manufacturing MEMS devices such as microphones, inertial sensors and RF switches, often requires a "release etch" step to remove a sacrificial layer to allow free movement of specific parts of the mechanical structure. SPTS said that the acquisition strengthens its MEMS vapor release etch IP and product portfolio.
