The company will be showcasing standardized MEMS process technologies that advance the speed of commercialization of emerging sensing applications. Micralyne will be featuring MicraMOx, a MEMS process platform for highly miniaturized metal oxide gas sensors for environmental sensing applications. Localized gas sensing is critically important in industrial settings and in homes. Coupled with IoT use cases, miniaturized gas sensors enable economical and connected environmental sensing. Metal oxide gas sensors have been available for many years, but they required improvements in power consumption, cost, stability, and gas selectivity.
Also, Micralyne’s MicraGEM-Si platform is a set of standardized MEMS processes for optical applications. This platform can be used to develop a range of MEMS based optical devices such as micro-mirrors, optical switches, and bio-sensors. Micro-mirrors are increasingly being considered for perception sensing in numerous third generation optical applications such as autonomous vehicles, advanced robotics, and gesture recognition.
Figure 1. Metal oxide gas sensor with integrated micro hotplate, 1mm x 1mm die size. Image courtesy of Micralyne.
The company’s MicraFluidics platform uses a versatile set of standardized microfluidic processes featuring a variety of substrate options for biomedical customers such as silicon, glass, and silicon-on-insulator (SOI). Design flexibility enables multi-level channels, electrode patterning for dielectrophoresis and embedded sensors, and choice of glass or silicon as input and output ports. Micralyne says it has validated this technology in a wide range of devices such as flow cells, biochips, lab-on-a-chip, cell sorters, separation and analysis devices, and high-pressure analytical chips.
Figure 2: Metal oxide gas sensor chips. Image courtesy of Micralyne.
Finally, Micralyne’s MicraSilQ wafer level packaging (WLP) process platform for MEMS devices provides an all-in-one customer solution integrating wafer level fabrication, as well as hermetic packaging, and includes a through-silicon-via (TSV) architecture. The MicraSilQ process platform reduces initial development cost, overall manufacturing component cost, footprint, thickness and weight, while simultaneously providing improved electrical performance, reliability, and extensibility into 3D IC designs.
Micralyne says its MEMS technology platforms provide a modular approach to MEMS design and enable fast prototyping with semi-custom device implementations, and rapid manufacturing ramp-up while maintaining product quality and consistency. The company started providing standard processes and MEMS building blocks in 2006 with an effort to lower MEMS development costs and accelerate MEMS time-to-market for customers. Micralyne’s technology platform offerings include a process design kit (PDK), design guides, CAD models and device calculators (for critical parameters).
Micralyne is one of the world’s leading independent developers and manufacturers of MEMS and micro-fabricated products. The company is a provider of MEMS sensors and other microstructures that differentiate applications such as IoT devices, medical technologies, and optical communications.
Headquartered in Edmonton, Alberta, Canada, Micralyne’s customer base includes Fortune 500 companies, mid-range industrial and biomedical companies, and high-tech start-ups.
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