MEMS manufacturing: Mosaic Microsystems, Axus Technology collaborating on thin glass wafer processing solutions

Axus Technology, a provider of CMP, wafer thinning, and wafer surface processing solutions for semiconductor applications, is working with Mosaic Microsystems to build the supply chain for thin glass and through-glass via (TGV) processing and heterogeneous microelectronic packaging. Overcoming the challenges of handling, thinning, and cleaning <200 um thick wafers cost effectively prior to metallization is a key element in providing a robust, scalable process. Mosaic’s thin glass solutions provide key performance characteristics such as low loss, CTE match, environmental stability, and cost-effectiveness particularly desirable for 5G applications, as well as for MEMS and sensors for the internet of things (IoT). The company’s proprietary temporary bond technology supports thin glass substrates during downstream processing. This thin glass handling technology allows the supply chain to leverage the existing infrastructure for next generation microelectronics and photonics applications.