by Jacopo Iannacci, Ph.D.
Researcher, MEMS Research Unit of FBK
RF MEMS devices are microsystems manufactured in a suitable technology platform, typically characterized by having movable micro-parts capable of reconfiguring the RF characteristics of a device. Some RF micro-components are categorized as RF MEMS devices despite not having any movable or deformable parts. This is because such devices are manufactured in a surface or bulk micromachining technology, or in a combination of both, and such techniques are considered as the de-facto standard for the realization of RF MEMS devices and components. In this article, we review all of the main categories of RF MEMS lumped components and networks, and also specify their purpose, functionality, typical applications, as well as pros and cons compared to the traditional implementation of the same devices.
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