MEMS Journal -- The Largest MEMS Publication in the World

An overview of RF MEMS technologies and applications

by Jacopo Iannacci, Ph.D.
Researcher, MEMS Research Unit of FBK

RF MEMS devices are microsystems manufactured in a suitable technology platform, typically characterized by having movable micro-parts capable of reconfiguring the RF characteristics of a device.  Some RF micro-components are categorized as RF MEMS devices despite not having any movable or deformable parts.  This is because such devices are manufactured in a surface or bulk micromachining technology, or in a combination of both, and such techniques are considered as the de-facto standard for the realization of RF MEMS devices and components.  In this article, we review all of the main categories of RF MEMS lumped components and networks, and also specify their purpose, functionality, typical applications, as well as pros and cons compared to the traditional implementation of the same devices.

Automated test equipment: can MEMS switches compete?

As production volumes grow and competition increases in the IC and electronics industries, switching is becoming an increasingly critical component for the automated test equipment (ATE) system makers.  Simply put, test costs are growing and therefore produce a negative affect for the profitability of manufacturers.  MEMS based switches are now becoming a viable and advantageous alternative to traditional technologies such as electromechanical relays, reed relays and semiconductor switches.  We recently spoke with Dr. Dan Hyman, a leading industry expert and President of XCOM Wireless, about the current state of the ATE industry and his expectations for the future.  In this comprehensive interview, Dr. Hyman presents his views on the current status of ATE switching including main industry trends, device costs as well as upcoming technology developments.

DelfMEMS delivers custom RF MEMS samples to NTT DOCOMO

DelfMEMS, an emerging RF MEMS technology company, reported this week that it has successfully delivered custom samples to NTT DOCOMO, the Japanese mobile operator.  DelfMEMS has provided arrays of custom MEMS ohmic switches to enable tunability into RF front-end modules, or FEMs, for mobile applications.  DelfMEMS said that voltage, size, losses, isolation, ultra-fast switching time and power handling will be evaluated by NTT DOCOMO according to the requested specifications which cover a frequence range of up to 6 GHz.

RF MEMS switches for MRI, satellite and electronic instrumentation applications

New RF MEMS metal-contact switches developed at the University of California, San Diego could make their way into MRIs and other medical equipment, satellites, and electronic instrumentation such as spectrum analyzers and signal sources.   This new RF MEMS technology was  recently featured and won the top prize at UCSD's  Research Expo 2011.  This brief video outlines the basics of the new technology.

ST, Bluechiip to partner on manufacturing of MEMS RFID tags

STMicroelectronics, a leading supplier of MEMS devices for consumer and portable applications, and Bluechiip, an early-stage company that has developed a MEMS based asset tracking solution, announced this week that the two companies will cooperate in further commercialization of Bluechiip's MEMS based tracking tags, aimed at a range of different markets, but initially in healthcare, such as biobanks.  Through this partnership, ST will be responsonsible for manufacturing of Bluechiip's MEMS based tracking tags into high-volume production.

GE partners with Avery Dennison to commercialize RF sensor technology

General Electric, acting through its Technology Ventures operation, announced this week its intent to commercialize GE's radio frequency sensing technology through a commercial license to the RFID division of Avery Dennison.  According to GE, this technology will enable a wide range of low-cost wireless sensing products in a series of applications, including industrial, food and beverage, packaging and pollution prevention.  The agreement will bring to market GE's RFID based wireless sensor technology that can detect and measure chemical, physical, and biological conditions in a variety of applications.

RF MEMS switches and varactors finally arrive

by Jérémie Bouchaud
Director and Principal Analyst, MEMS & Sensors, iSuppli

Like many new technologies, RF MEMS and varactors followed a well documented trajectory.  The problem as the technology emerged early in 2003 was that the devices could not live up to their initial promise, which led to disillusionment among the companies eagerly awaiting these new devices.  Another problem was that the devices were offered by startups, which often burn brightly for only a short time and then disappear.  The list of startups that fall into this category is quite long, and includes Magfusion, Siverta, TeraVicta, Simpler Networks, Sagamore, etc., but there are also larger groups that failed to bring the cost down like Panasonic Electric Works, which sampled from the end of 2005 to 2008.

MEMS based electronically steerable antennas

by John Maciel, Ph.D.
Chief Operating Officer, Radant MEMS, Inc.

Rapid beam scanning, beam agility, the performance of diverse functions such as multiple target tracking and fire control, reduced radar cross section (RCS), and reduced physical profile are some of the numerous performance benefits to military systems employing an electronically steerable antenna (ESA) in lieu of more typical, mechanically gimbaled antenna systems.  These gains are obtained at the expense of large increases in overall system weight, prime-power consumption, and cost when conventional discrete phase shifter or active transmit/receive (T/R) module control devices are employed. Arrays fabricated with these conventional discrete control devices are excessively heavy, costly, and consume more prime power than available for many applications.  Lightweight, low power, and low-cost are mission critical characteristics for elevated sensors such as those proposed for aerostat, airship and space-based antennas.  Other defense applications include warfighter protection and situational awareness, national missile defense, theatre missile defense and satellite communications. A lightweight X-Band ESA can be employed in a fire control radar for cruise missile (CM) defense precision track and engagement support, CM horizon surveillance, tactical ballistic missile surveillance and cueing, missile and artillery backtracking, and surface ship surveillance and tracking. The potential applications are diverse and permeate across all services, Air Force, Navy and Army.

RF MEMS startup DelfMEMS secures $1.9 million funding

DelfMEMS, an emerging player in the field of RF components and developer of MEMS switching solutions, announced this week that it has secured $1.9 million in venture capital funds. This investment comes from A2D Invest, Alliansys, Finorpa, Inovam, Rhône-Alpes-Création, as well as business angels and will be used for delivering stand-alone component products for instrumentation and defense as well as creating partnerships for integration into mobile phone front-end modules.

Other companies working on ohmic RF MEMS switches include Analog Devices, Radant MEMS, Panasonic, Omron, Baolab, RFMD and Ommic.  Startup company TeraVicta was also working on RF MEMS swiches, but went out of business in 2008.

Cell phone antenna troubles? RF MEMS come to the rescue

Assistance may be on the way for iPhone 4 users frustrated by dropped calls with the arrival of RF MEMS, devices that can improve the performance of antennas in cell phones, according to the market research firm iSuppli Corp.  Long plagued by technological hurdles and other disappointing setbacks, RF MEMS are finally ready for the big time, with revenue projected to double in 2010 and more than triple in 2011.

From slightly less than $4 million in 2006, global RF MEMS revenue is anticipated to climb to $8.1 million this year -- and then surge to $27.9 million in 2011, according to iSuppli.  By 2014, revenue will reach a whopping $223.2 million -- a far cry from the industry’s extremely modest beginnings.